|
| WELL2824
: Metrology - PIKE MAP300 Automatic Semiconductor Wafer Analyzer |
|
|
This Pike MAP300 is a fully automated
accessory for the mapping analysis of wafers
in specular reflection or transmission mode.
It can accept wafers up to 12-inch (300-mm)
in diameter.
Up to 12-inch (300-mm) semiconductor
wafer handling.
Optional inserts for wafer
sizes:2,4,6,8,12-inches
EPI, BPSG, oxygen and carbon
determination
Specular reflectance and transmission
sampling – standard
Purge Gas accessory for removal of
atmospheric interferences
PC controller interface
A complete set combined with a FT-IR
spectrometer for automated, multi-position
measurements and mapping of semiconductor
wafers.
|
|
|
|
| |
Copyright (C) 2002-2023, WELLTECH All rights reserved.
|
|
