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WELL2825
: Metrology - PIKE MappIR with N2 Purging Chamber |
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To minimize interferences of water vapor and
carbon dioxide with infrared measurements,
the optical path of the accessories is
equipped with purging lines and can be
purged with dry air or nitrogen(N2). A Wafer
Purge Enclosure(N2 Purging Chamber) is also
available as an option.
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