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| WELL2823
: Metrology - PIKE MappIR Automatic Semiconductor Wafer Analyzer |
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This MappIR is a fully automated accessory
for the mapping analysis of wafers in
specular reflection or transmission mode. It
can accept wafers up to 8 inches (200 mm) in
diameter.
Max.8-inch (200-mm) semiconductor wafer
handling.
Optional inserts for wafer
sizes:2,4,6,8-inches
EPI, BPSG, oxygen and carbon
determination
Specular reflectance and transmission
sampling – standard
Purge Gas accessory for removal of
atmospheric interferences
PC controller interface
A complete set combined with a FT-IR
spectrometer for automated, multi-position
measurements and mapping of semiconductor
wafers.
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