Description

Shimadzu SolidSpec-3700 UV/VIS/NIR Spectrophotometer is an
optimized, high-performance wafer inspection equipment. It
has equipped with automatic X-Y testing system and an
integrating sphere for precision measuring of 6" 8"
12"inch Silicon Wafers or for very large sample. Max.700mm
× 560mm.

  • Large Sample Compartment
  • Three(3) Detectors: PMT, InGaAs, PbS
  • Integrating sphere (Diffuse & Specular)

  • (P/N 206-20810-58) Automatic X–Y
    Stage (Optional) installed for 6/8/12 inch
    Silicon Wafer (or a large solar-film glass).
    Sample Sizes: Max. 310mm dia. 310mm X 310mm,
    40mm: A powerful tool for high-throughput
    measurements. This accessory automatically
    measures multiple points.

  • (P/N 206-20264-91)Direct Detection
    Unit, DDU (Optional) installed. Measuring
    Range: 190nm ~3,300nm.
  • (P/N 206-20570-
    91) Large Specular Reflectance Attachment,
    5°incident angle (Optional) included. Sample
    Sizes: Max. 470mm x 560mm, 40mm thickness.

  • (P/N 204-58909) Film Holder(Optional)
    included. Sample Sizes: Min. 16mm W. × 32mm
    H / Max. 80mm W× 40mm H.

  • System Control Computer & Data Acquisition SW:
    (Windows-7 O/S, SolidSpec-3700 Control SW), Operating
    Manuals, etc.