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WELL2876
: Shimadzu SolidSpec-3700 UV-VIS-NIR Spectrophotometer, Metrology 6-8-12 inch Wafer |
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Shimadzu SolidSpec-3700 UV/VIS/NIR Spectrophotometer is an
optimized, high-performance wafer inspection equipment. It
has equipped with automatic X-Y testing system and an
integrating sphere for precision measuring of 6" 8"
12"inch Silicon Wafers or for very large sample. Max.700mm
× 560mm.
Large Sample Compartment
Three(3) Detectors: PMT, InGaAs, PbS
Integrating sphere (Diffuse & Specular)
(P/N 206-20810-58) Automatic X–Y
Stage (Optional) installed for 6/8/12 inch
Silicon Wafer (or a large solar-film glass).
Sample Sizes: Max. 310mm dia. 310mm X 310mm,
40mm: A powerful tool for high-throughput
measurements. This accessory automatically
measures multiple points.
(P/N 206-20264-91)Direct Detection
Unit, DDU (Optional) installed. Measuring
Range: 190nm ~3,300nm. (P/N 206-20570-
91) Large Specular Reflectance Attachment,
5°incident angle (Optional) included. Sample
Sizes: Max. 470mm x 560mm, 40mm thickness.
(P/N 204-58909) Film Holder(Optional)
included. Sample Sizes: Min. 16mm W. × 32mm
H / Max. 80mm W× 40mm H.
System Control Computer & Data Acquisition SW:
(Windows-7 O/S, SolidSpec-3700 Control SW), O
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